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DGaO
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ISSN 1614-8436
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H. Schenk
H. Schenk
1 paper
P16 · Poster · 124. Conference (2023)
Optical Through-Silicon Waveguides for 3D-Chip-Interconnections
F. Villasmunta , P. Steglich , F. Heinrich, C. Villringer, A. Mai , S. Schrader, H. Schenk