T. M. H. Rahman

Bremen Institute for Metrology, Automation and Quality Science (BIMAQ), University of Bremen

1 Beitrag

A21 · Vortrag · 125. Tagung (2024)

Scatterometry-based assessment of defective nanograss surfaces - a virtual experimentation setup for uncertainty analysis

T. M. H. Rahman, D. Stöbener, A. Fischer