R. Fechner

Leibniz -Institut für Oberflächenmodifizierung e.V.,Permoserstr. 15, 04318 Leipzig, Germany

6 papers

P60 · Poster · 117. Conference (2016)

Ion beam etching process simulation for the pattern transfer of photoresist diffraction gratings generated by holography

M. Burkhardt, R. Fechner, F. Frost, S. Sinzinger

B12 · Talk · 116. Conference (2015)

Blazed XUV Gratings with a Very Low Level of Stray Light

M. Burkhardt, R. Fechner, A. Nickel, F. Frost, A. Gatto, C. Laubis, F. Scholze, S. Sinzinger, V. Soltwisch

P19 · Poster · 115. Conference (2014)

Streulichtarme holografische Blaze-Gitter für den EUV-Bereich

M. Burkhardt, R. Fechner, D. Flamm, F. Frost, A. Gatto, C. Laubis, F. Scholze, S. Sinzinger, V. Soltwisch

A3 · Talk · 113. Conference (2012)

Imaging gratings with modulated blaze realized by a combination of holography and reactive ion beam etching

M. Burkhardt, R. Fechner, L.Erdmann, F.Frost, R. Steiner, O. Sandfuchs, A. Schindler, A. Gatto, S. Sinzinger

A21 · Talk · 108. Conference (2007)

Sub-Nanometer-RMS Rauheit von Einkorn-diamantgedrehten Metalloberflächen mittels Ionenstrahlglättung

F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura

P44 · Poster · 108. Conference (2007)

Fabrication of resonant grating pulse compression element with 99% flat top efficiency for high average power femtosecond laser machining

O. Parriaux, R. Fechner, M. Flury, S. Tonchev, N. Lyndin, A. Schindler