V. D. Calzadilla

Carl Zeiss AG, Corporate Research and Technology, Oberkochen

1 Beitrag

A27 · Vortrag · 113. Tagung (2012)

Nanometrology of molded sub-µm structures by means of light scattering

F. Widulle, V. D. Calzadilla, S. Shukla, B. Kleemann