P13 · Poster · 114. Tagung (2013)
Coherent Fourier Scatterometry combined with Interferometry
S. Roy, N. Kumar, S. F. Pereira, H. P. Urbach
B34 · Vortrag · 113. Tagung (2012)
Experimental Validation of the Extended-Nijboer-Zernike (ENZ) based Aberration Retrieval Method for Microscope Objectives
A. Wiegmann, S. van Haver, N. Kumar, S.F. Pereira