G. Seitz
Carl Zeiss SMT AG
3 papers
B9 · Talk · 107. Conference (2006)
Hochaufgelöste interferometrische Absolutmessung rotationssymmetrischer Oberflächen-Fehler
A10 · Talk · 106. Conference (2005)
Absolute interferometeric measurement of non rotational symmetric surface errors - a new evaluation concept
A10 · Talk · 105. Conference (2004)