J. Reck

SENTECH Instruments GmbH, Schwarzschildstraße 2,12489 Berlin , Germany

3 papers

B35 · Talk · 124. Conference (2023)

Messverfahren zur Kontrolle tiefer Siliziumstrukturen für die 3D-Chip-Integration

J. Bauer, F. Villasmunta, F. Heinrich, C. Villringer, J. Reck, S. Peters, A. Treffer, Chr. Kuhnt , St. Marschmeyer, O. Fursenko, P. Steglich , A. Mai , S. Schrader, M. Regehly

P26 · Poster · 121. Conference (2020)

Analysis of ellipsometric layer thickness measurements applying a novel optimization method for depolarizing Mueller matrices

T. Grunewald, M. Wurm, S. Teichert, B. Bodermann, J. Reck, U. Richter

P10 · Poster · 120. Conference (2019)

A new method to derive best-fit parameters and their uncertainties from depolarizing Mueller-matrices

T. Grunewald, M. Wurm, S. Teichert, B. Bodermann, J. Reck, U. Richter