A. Savchenko

Institut für Technische Optik, Universität Stuttgart

4 papers

P10 · Poster · 127. Conference (2026)

Novel laser interference lithography setup on the basis of beam splitting Kösters-Prism

A. Savchenko, C. Pruß, S. Reichelt, A. Herkommer

B35 · Talk · 126. Conference (2025)

Effect of substrate thickness on the etching rate of diffractive optical elements

A. Savchenko, C. Pruß, A. Herkommer, S. Reichelt

A31 · Talk · 125. Conference (2024)

Stepped mask interference laser exposure (SMILE)

A. Savchenko, C. Pruß, A. Herkommer

B31 · Talk · 123. Conference (2022)

Fabrication of sub-wavelength circular diffraction gratings for high-power laser applications

A. Savchenko, C. Pruß, D. Bashir, D. Didychenko, M. Abdou-Ahmed