Testing aspherical surfaces in interferometric setup: Analysis and removal of alignment errors
Physikalisches Institut, Lehrstuhl für Optik, Universität Erlangen-Nürnberg, Staudstraße 7, D-91058 Erlangen, Germany
Abstract
An absolute interferometric test of non spherical surfaces like e.g. toroidal surfaces, is presented. The adjustment errors caused due to the tilt, decentre and defocus of the non spherical surfaces have been analysed in a Twymen Green interferometric setup. These errors have been computed mathematically for toroidal surfaces and then were removed from the measuring data to give the actual surface errors.
Keywords
Interferometry
Diffractive Optics
Inspection of Optical Systems
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@inproceedings{dgao106-p17,
title = {Testing aspherical surfaces in interferometric setup: Analysis and removal of alignment errors},
author = {G. Khan, K. Mantel, N. Lindlein, J. Schwider},
booktitle = {DGaO-Proceedings, 106. Jahrestagung},
year = {2005},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
issn = {1614-8436},
note = {Poster P17}
}
106. Jahrestagung der DGaO · Wrocław · 2005