Improved Combined Diffractive Optical Elements for quasi-absolute testing of Aspherics
- Institut für Optik, Information und Photonik, Friedrich-Alexander-Universität Erlangen-Nürnberg
gkhan [at] optik [dot] uni-erlangen [dot] de
Computer-generated diffractive optical elements have widely been in use for testing of aspherics in different interferometric setups. We present a three position quasi-absolute test for aspherics using combined-diffractive optical elements (Combo-DOEs). The calibration procedure works similar to the sphericity test by using three positions, while the Combo-DOE carries the information for the aspheric surface as well as the best fit sphere with a slight linear offset. Further, we discuss the effects of DOE's substrate quality on the accuracy of the proposed calibration procedure and present an improved design of the Combo-DOE. The results obtained with the quasi-absolute three position procedure are compared to an independent procedure, an N-position test.
@inproceedings{khan2006b12,
author = {Khan, Gufran and Mantel, Klaus and Lindlein, Norbert and Schwider, Johannes},
title = {{Improved Combined Diffractive Optical Elements for quasi-absolute testing of Aspherics}},
booktitle = {DGaO-Proceedings 2006},
series = {DGaO-Proceedings},
eventtitle = {107. Jahrestagung der DGaO},
eventdate = {2006-06-07/2006-06-10},
venue = {Weingarten},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
year = {2006},
pages = {B12},
langid = {english},
url = {https://dgao-proceedings.de/paper/107-b12}
}