Design Konzepte für breitbandige hoch effiziente DOEs

Bernd H. Kleemann1, Markus Seeßelberg1, Hans-Jürgen Dobschal1, Johannes Ruoff2
  1. 1Carl Zeiss AG
  2. 2Carl Zeiss SMT GmbH

b [dot] kleemann [at] zeiss [dot] de

Efficiency of diffractive lenses decrease for wavelengths deviating from design wavelength, which prevents them from a broader use in optical systems and consequently, usage is mostly limited to applications with small spectral bandwidth. This well known drawback holds for all diffractive elements (DEs) made of a single material, as they usually can be optimally designed only for a single wavelength. This can be overcome by special diffractive lenses consisting of two materials with different dispersion. Several design-concepts for broadband high-efficiency diffractive lenses so-called efficiency-achromatic diffractive elements (EA-DEs), are presented. Starting with surface relief profiles well known from the literature we present the following new approaches together with their properties: 1) gradient-index EA-DEs, 2) sub-wavelength EA-DEs, and 3) the so-called cut-and-paste design.

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@inproceedings{kleemann2008b3,
  author     = {Kleemann, Bernd H. and Seeßelberg, Markus and Dobschal, Hans-Jürgen and Ruoff, Johannes},
  title      = {{Design Konzepte für breitbandige hoch effiziente DOEs}},
  booktitle  = {DGaO-Proceedings 2008},
  series     = {DGaO-Proceedings},
  eventtitle = {109. Jahrestagung der DGaO},
  eventdate  = {2008-05-14/2008-05-17},
  venue      = {Esslingen},
  publisher  = {Deutsche Gesellschaft für angewandte Optik e.V.},
  year       = {2008},
  pages      = {B3},
  langid     = {english},
  url        = {https://dgao-proceedings.de/paper/109-b3}
}
109. Annual Conference of the DGaO · Esslingen · 2008