Optical form measurement of optical and technical surfaces with a scanning low-coherence heterodyne interferometer

Fabrication of precision optics, hard disk drives, machine tools, semiconductors and automotive parts requires fast high precision form measurement of optical and technical surfaces. The talk presents the scanning low-coherence heterodyne interferometer which allows fast measurements (10kHz sampling) with high resolution (lateral resolution 3-10µm, height resolution 1nm ). Different optical stylus allow measurements of complex surfaces and drillings (down to 80µm diameter). Measurements of optical and technical surfaces made of different materials are presented.