Integrated beam splitters for array microscopy in life science

For genome-wide screening, a large number of cell samples have to be investigated. This process is typically performed by classical wide field microscopy on array substrates and very time-consuming. In order to speed up this process, automated scanning techniques are used. A more significant speed up is achieved by miniaturized array microscopy. The micro-optical system is assembled by layers of micro-lenses and micro-beam splitters. For the fabrication process of integrated beam splitters, masters with 45° mirrors have been produced by micro milling and by deep lithography. The replicated structures of the master are coated and finally assembled. We discuss the advantages and disadvantages of micro milling vs. deep lithography and present first results of integrated beam splitters.