Micro-deflectometry in transmission

Institut für Optik, Information und Photonik
Universität Erlangen-Nürnberg

speterhaensel@optik.uni-erlangen.de

Abstract

We present a novel microscopic method that intrinsically measures local phase gradients of transparent objects. The method is based on "phase measuring deflectometry" [1] in transmission. Images similar to those achieved with differential interference contrast or with phase contrast are generated. However, the novel method displays some additional new features: the images display quantitative data about the lateral variation of the optical path length; the sensitivity reaches the physical limit: very small variations of the refractive index can be measured . Moreover, the method is simple (no interference !). Micro-deflectometry in transmission has the potential to compete with established methods to acquire phase object information.

Keywords

Mikroskopie 3D-Messtechnik
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@inproceedings{dgao110-p24, title = {Micro-deflectometry in transmission}, author = {S. Peterhänsel, C. Richter, C. Faber, M. Knauer, G. Häusler}, booktitle = {DGaO-Proceedings, 110. Jahrestagung}, year = {2009}, publisher = {Deutsche Gesellschaft für angewandte Optik e.V.}, issn = {1614-8436}, note = {Poster P24} }
110. Annual Conference of the DGaO · Brescia · 2009