Bulk and surface inhomogeneity of r.f. sputtered ITO films: an ellipsometric study
ENEA Research Centre, Optical Coatings Group, Via Anguillarese 301, 00123 Rome, Italy
Physics Department, University of Rome Tor Vergata and INSTM, via della Ricerca Scientifica 1, 00133 Rome, Italy
Abstract
Tin-doped indium oxide (ITO) films have been prepared by r.f. sputtering technique in pure Ar and Ar+O2 atmospheres. Additional substrate heating during the deposition was used for a half of the samples. The influence of both deposition conditions and post-annealing treatment on film inhomogeneity was studied using multiangle spectroscopic ellipsometry. The structural and microstructural properties of the ITO films have been compared to the film inhomogeneity values.
Keywords
Thin Films
Optical Materials
Spectroscopy
@inproceedings{dgao110-p27,
title = {Bulk and surface inhomogeneity of r.f. sputtered ITO films: an ellipsometric study},
author = {A. Krasilnikova Sytchkova, S. Schutzmann},
booktitle = {DGaO-Proceedings, 110. Jahrestagung},
year = {2009},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
issn = {1614-8436},
note = {Poster P27}
}
110. Annual Conference of the DGaO · Brescia · 2009