Electron Microscopy - An Overview

In the last decades electron microscopy has become a standard evaluation technique in the field of semiconductor technology, materials science as well as life science. The capability of modern electron microscopes to extend the resolution limit to atomic resolution makes them a very powerful tool to investigate the nanostructure on various samples. We will give an historical overview over the evolution of electron microscopy in the last decades. The presentation will cover the technology background and operating principle of modern electron microscopes as well as state of the art applications for transmission electron microscopy, scanning electron microscopy and focused ion beam applications.