Microsystem concept for sensing applications

Ecole Polytechnique Fédérale de Lausanne (EPFL), Optics & Photonics Technology Laboratory

hanspeter.herzig@epfl.ch

Abstract

Micro- and nano-optical structures have been widely studied, because they push the frontier of miniaturization of optical components and provide new phenomena due to the light-mater interactions at the nanoscale. In several research fields, such as telecommunication, health, environment and sensing, nanostructures start nowadays to be used and commercialized. System concepts, such as photonic crystals or plasmonic structures, are proposed to realize compact devices. Powerful micromachining tools promise their low-cost mass production. However, the productions costs are only low if the market for such devices is large enough. This is often not the case. Therefore, it is important to base the microsystem fabrication on a platform concept. The platform can be produced in large quantities and then be adapted to a specific task. We will discuss such a planar platform that is suitable for sensing applications. The platform is based on Bragg multilayer’s, which sustain Bloch surface waves. Interesting is also that the light propagation through the optical structures can be observed with a near-field microscope, which opens the door for fundamental investigations of micro and nanostructures.

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@inproceedings{dgao112-h5, title = {Microsystem concept for sensing applications}, author = {Hans Peter Herzig}, booktitle = {DGaO-Proceedings, 112. Jahrestagung}, year = {2011}, publisher = {Deutsche Gesellschaft für angewandte Optik e.V.}, issn = {1614-8436}, note = {Vortrag H5} }
112. Jahrestagung der DGaO · Ilmenau · 2011