Interferometric Homogeneity Test using Adaptive Frequency Comb Illumination

Max Planck Institute for the Science of Light, Erlangen; 2 Institute of Optics, Information, and Photonics, University of Erlangen-Nürnberg

Klaus.Mantel@mpl.mpg.de

Abstract

Homogeneity tests require the separation of refractive index variations of glass plates from surface deformations or geometrical thickness variations. This separation requires a combination of reflected and transmitted light tests within an interferometer cavity. For the measurement in transmitted light, however, this leads to a nested cavity setup. To separate the interference signals from the different cavities, we illuminate a Fizeau interferometer with an adaptive frequency comb, where the illuminating laser source has been replaced by a broad band light source with a spectral comb structure [1]. In this way, rigid glass plates can be measured, and linear variations in the homogeneity can also be detected. Compared to approaches using a two-beam interferometer as a filter for the broad band light source, the visibility of the fringe system is considerably higher. [1] I. Harder, G. Leuchs, K. Mantel, J. Schwider, "Adaptive frequency comb illumination for interferometry in the case of nested two-beam cavities", Appl. Opt. 50, p.4942-4956 (2011)

Keywords

Messtechnik Interferometrie
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@inproceedings{dgao113-a13, title = {Interferometric Homogeneity Test using Adaptive Frequency Comb Illumination}, author = {K. Mantel, J. Schwider}, booktitle = {DGaO-Proceedings, 113. Jahrestagung}, year = {2012}, publisher = {Deutsche Gesellschaft für angewandte Optik e.V.}, issn = {1614-8436}, note = {Vortrag A13} }
113. Jahrestagung der DGaO · Eindhoven · 2012