Fully automated form and radius measurement of microoptic components based on Shack-Hartmann sensor technology

The form measurement of micro-optic components is a big challenge due to the increasing complexity of the surfaces and the demand of short measurement times. The often aspheric surfaces sometimes inherit a large slope angles near the outer diameter. One possibility to measure the form of this kind of lenses is given by the measurement of the wavefront reflected on the sample surface. Large slope angles can be measured by illuminating the sample with a spherical wavefront. The topography is measured relative to a basic sphere with a radius which has to be determined additionally. We present a fully automated measurement system based on a Shack-Hartmann sensor in reflection mode. This setup enables to measure topography and base radius of the lens surface within a short measurement time. Measurement principle and limitations are discussed in this talk.