High parallel scanning microscope with an aberration free diffractive micro-lens array

The investigation of large samples with high resolution using a scanning microscope is a challenging task in optics. In this submission a high parallel scanning microscope is presented. The key component of the microscope is a diffractive micro-lens array with overlapping apertures. Thus the lens separation can be smaller than the lens diameter. Such a type of apertures can only be achieved by diffractive optics. Due to the overlap, a higher degree of parallelism can be reached compared to classical refractive micro-lenses. [1] We present experimental results with diffractive micro-lenses of moderate numerical aperture. Additionally, we show how to apply a cover slip correction in the design of these diffractive micro-lenses. [1] K.-H. Brenner, T. Stenau, M. Azizian, Entwicklung eines scannenden Mikroskops mit diffraktiven Mikrolinsen, DGaO 2013 Braunschweig