High parallel scanning microscope with an aberration free diffractive micro-lens array

Tim Stenau, Karl-Heinz Brenner
  1. Lehrstuhl für Optoelektronik, Institut für Technische Informatik, Universität Heidelberg

tim [dot] stenau [at] ziti [dot] uni-heidelberg [dot] de

The investigation of large samples with high resolution using a scanning microscope is a challenging task in optics. In this submission a high parallel scanning microscope is presented. The key component of the microscope is a diffractive micro-lens array with overlapping apertures. Thus the lens separation can be smaller than the lens diameter. Such a type of apertures can only be achieved by diffractive optics. Due to the overlap, a higher degree of parallelism can be reached compared to classical refractive micro-lenses. [1] We present experimental results with diffractive micro-lenses of moderate numerical aperture. Additionally, we show how to apply a cover slip correction in the design of these diffractive micro-lenses. [1] K.-H. Brenner, T. Stenau, M. Azizian, Entwicklung eines scannenden Mikroskops mit diffraktiven Mikrolinsen, DGaO 2013 Braunschweig

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@inproceedings{stenau2015a17,
  author     = {Stenau, Tim and Brenner, Karl-Heinz},
  title      = {{High parallel scanning microscope with an aberration free diffractive micro-lens array}},
  booktitle  = {DGaO-Proceedings 2015},
  series     = {DGaO-Proceedings},
  eventtitle = {116. Jahrestagung der DGaO},
  eventdate  = {2015-05-27/2015-05-29},
  venue      = {Brno},
  publisher  = {Deutsche Gesellschaft für angewandte Optik e.V.},
  year       = {2015},
  pages      = {A17},
  langid     = {english},
  url        = {https://dgao-proceedings.de/paper/116-a17}
}
116. Jahrestagung der DGaO · Brno · 2015