Compact and fast sensor systems for light scattering analysis of optical components

Light scattering measurement techniques are flexible, robust, non-contact, and highly sensitive; advantages which are required for different characterization tasks. In particular optical components and surfaces are usually characterized with highly sensitive and elaborated goniometer systems. Recently, a new detector matrix based measurement approach has been developed at the Fraunhofer IOF which combines the advantages of light scattering measurements with in-line capabilities. The corresponding compact light scattering sensors can be integrated in manufacturing and inspection processes and are even capable for real-time data acquisition. We report on analysis techniques, specifically developed for this new approach, which provide links between the obtained angle resolved scattering (BRDF) results and the structural properties of optical components. Therefore, application examples for the characterization of surface roughness, nano-structures, and defects are presented. In addition, methods for the quality assessment of multilayer coatings as well as technically rough surfaces are introduced.