Combined optical sensor for simultaneously measuring roughness and 3D shape

The manufacturing of optical components and functional mechanical parts with high surface quality is usually time-consuming and expensive. The final performance of the manufactured components critically depends on the surface micro structure, the shape, or both. The in-line monitoring and control of roughness and shape therefore enables a targeted process optimization. A new optical sensor which enables the combination of 3D geometry and roughness measurements to analyze shape, microstructure, and roughness simultaneously at the same position of the object has been developed. The main challenge was the fusion of two completely different sensor principles in one setup. The design of the system aims at the integration into manufacturing machines for optical and mechanical components. The functional principle of the combined sensor and first measurement results on samples from various manufacturing processes with different geometries and materials will be presented.