Fast and reliable in-situ measurements of large and complex surfaces using a novel deflectometric device
- 1Hofbauer Optik Mess- und Prüftechnik
- 2Optical Engineering Laboratory, Deggendorf Institute of Technology
e [dot] hofbauer [at] hofbauer-optik [dot] de
In-situ measuremens of complex surfaces during the polishing process is a challenge for the production of aspheric surfaces or freeforms. We are providing a new attempt by using a scanning deflectometric device based on our recently publshed DaOS principle, which allows in-situ measurements of large optical surfaces in realistic production enviroments. The results of in-situ surface measurements after two polishing steps of a large glass substrate (320mm in diameter) in alever-polishing machine (NLP-500 from Stock Konstruktion) are shown and critically compared with interferometric measurements on a SSI-A Interferometer. In this presentation, the technical setup consisting of a highly precise scanning penta prism device and a Vignetting Field Stop Sensor is explained.
@inproceedings{hofbauer2018p59,
author = {Hofbauer, Engelbert and Kometer, Ronald},
title = {{Fast and reliable in-situ measurements of large and complex surfaces using a novel deflectometric device}},
booktitle = {DGaO-Proceedings 2018},
series = {DGaO-Proceedings},
eventtitle = {119. Jahrestagung der DGaO},
eventdate = {2018-05-23/2018-05-26},
venue = {Aalen},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
year = {2018},
pages = {P59},
langid = {english},
url = {https://dgao-proceedings.de/paper/119-p59}
}