Evaluation of the scalable interferometer „Mickey 350“

At DGaO 2023, we presented the idea and realization of a scalable Fizeau interferometer. Our goal was a single optical design for different apertures at low cost, resulting in a system based on a plano-convex collimating lens. The core of the interferometer, consisting of the illumination and imaging optics, can be used for a large diameter range from 250mm to 600mm. For the production of ASML lithography systems, we are constantly confronted with new flat measurement objects of different sizes. The use case of our design is not to change the aperture of an existing setup, but to create a new setup with the best diameter that can be easily realized. In the meantime, we have completed the alignment and calibration of the laboratory setup „Mickey“ (the *key* to our *m*odular *i*nterferometer *c*oncept) with an aperture of 350mm. We would like to show the results and compare our most important optimization parameters - image quality, distortion and field curvature - with the simulation. This results in some lessons that we would like to pass on for self-built interferometers with high quality requirements. We also give a brief outlook on planned research topics for Mickey 350. 62 ferometrie I C. Pruß