Comparison of a rigorous confocal microscope model with real measurements on a 1D grid

A model of a confocal microscope has been developed and used for first simulations. The model uses the Boundary Element Method (BEM) to solve the Maxwell equations numerically for the interaction of the light with the object under test. For this part of the model the program SpeckleSim, developed and provided by the Institute of Technical Optics of the University of Stuttgart, is used. The imaging process of the microscope is realized with an implementation based on Fourier optics. The model is used to simulate a confocal measurement of a rectangular line structure, whereby the selected parameters of the measurement system correspond as closely as possible to the values of a real confocal microscope, the twip Consigno UL. To minimize the computing time, only the smallest symmetrical unit was simulated and then built up into a line structure by mirroring and lining up. The result is compared with a real confocal measurement of a 1D grating. The surface used as input for the simulation has the same dimensions (pitch, width and height) and geometry as the nominal values of the measured 1D grating. The first results of this comparison are presented. 12:00 Ende der Tagung 102 onenten- und Systemmodellierung H. Rehn S A M S T A G