Investigating Diffractive Optical Elements for Plasmonic Lithography Applications

Diffractive optical elements (DOEs) are widely used for shaping light by modulating its phase, intensity, and polarization. This work focuses on designing and simulating DOEs to explore their potential in generating light distributions suitable for plasmonic lithography, a promising technique for high-resolution patterning. As part of this study, different DOE design strategies will be analyzed to understand how they can be tailored to meet the requirements of plasmonic lens excitation. This investigation is intended as a foundational step toward developing the skills and insights needed for future research in DOE design and its integration with advanced optical systems. While the primary goal is to gain a deeper understanding of the design process, the work also aims to highlight the versatility of DOEs in enabling novel optical applications. 104 kdesign und Theoretische Optik P O S T E R