S. Peterhänsel

SCoPE - Stuttgart Research Center of Photonic Engineering

3 papers

B4 · Talk · 114. Conference (2013)

Studying fabrication induced phase errors in CGHs using RCWA

S. Peterhänsel , C. Pruss , W. Osten

A11 · Talk · 112. Conference (2011)

Fourier-Scatterometrie zur Charakterisierung von sub-lambda Zwei-Photonen-Polymerisations-strukturierten Kreuzgittern

V. Ferreras Paz , S. Peterhänsel , K. Frenner , W. Osten , A. Ovsianikov , K. Obata , B. N. Chichkov

P24 · Poster · 110. Conference (2009)

Micro-deflectometry in transmission

S. Peterhänsel, C. Richter, C. Faber, M. Knauer, G. Häusler