O. Paul

Dept. Microsystems Eng. - IMTEK, Univ. Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg

1 paper

A13 · Talk · 111. Conference (2010)

Measurement of nanometric deformations of microsystems

G. Pedrini, S. Maisch, J. Gaspar, O. Paul, W. Osten