R. Voelkel

SUSS MicroOptics SA, Neuchatel, Switzerland

3 papers

A1 · Talk · 113. Conference (2012)

AMALITH: Advanced Mask Aligner Lithography

A. Bramati, T. Weichelt, L. Stürzebecher, B. Meliorisz, U. Vogler, R. Voelkel

A2 · Talk · 113. Conference (2012)

MO Exposure Optics: Pushing Limits of Shadow Printing Lithography in Mask Aligners

U. Vogler, A. Bramati, R. Voelkel, M. Hornung

H2 · Keynote · 113. Conference (2012)

Optical Lithography - Key Enabling Technology for our Modern World