T. Weichelt

SUSS MicroOptics SA, Neuchatel, Switzerland

1 paper

A1 · Talk · 113. Conference (2012)

AMALITH: Advanced Mask Aligner Lithography

A. Bramati, T. Weichelt, L. Stürzebecher, B. Meliorisz, U. Vogler, R. Voelkel