E. Kley

Institut für Angewandte Physik, Friedrich-Schiller-Universität Jena

1 paper

P36 · Poster · 106. Conference (2005)

Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects

R. Heming, J. Jahns, M. Gruber, L. Wittig, E. Kley