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ISSN 1614-8436
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P. Reinig
P. Reinig
Qimonda, Dresden
1 paper
B5 · Talk · 107. Conference (2006)
Scatterometrie an Kreuzgitterstrukturen
T. Schuster, J. Kauffmann, N. Kerwien, H. J. Tiziani, W. Osten, P. Reinig