DGaO·Proceedings ISSN 1614-8436
DE

C. Lutzweiler

Carl Zeiss AG, Jena

1 paper

B19 · Talk · 123. Conference (2022)

Improving optical metrology by subpixel reference imaging simulations

D. Seidel, J. Umlauft, C. Lutzweiler, C. Husemann