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DGaO
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Proceedings
ISSN 1614-8436
DE
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M. Stumpf
M. Stumpf
Carl Zeiss Jena GmbH
1 paper
B30 · Talk · 123. Conference (2022)
Abbildende holografische EUV-Gitter
M. Burkhardt, M. Steglich, A. Kalies, M. Stumpf, D. Lehr