V. Burgarth

ASML Berlin GmbH

3 papers

A25 · Talk · 126. Conference (2025)

Evaluation of the scalable interferometer „Mickey 350“

A. Bielke, V. Burgarth

A17 · Talk · 124. Conference (2023)

Scalable Fizeau Interferometer

A. Bielke, V. Burgarth, M. Petrov

B41 · Talk · 124. Conference (2023)

Using a white noise reference object to determine the depth of field of the instrument transfer function for Fizeau interferometers

D. Fischer, V. Burgarth