Traceable Multiple Sensor System for High Accuracy Form Measurement

In form metrology scanning systems can successfully be used if large specimen are to be measured or small lateral resolution is needed. The desired lateral resolution is sometimes much smaller than one millimeter, whereas the size of the specimen can exceed one meter. Scanning systems with multiple sensors additionally allow to reduce the influence of random and systematic errors. A multiple sensor concept will be presented, that is capable of measuring large flat or curved surfaces with high accuracy, high lateral resolution and traceable to the basic units. Examples of measurements with a demonstrator set-up show the potential of this concept.