Full-field macroscopic measurement of specular, curved surfaces with SIM

Zheng Yang, Philipp Dienstbier, Alexander Bielke, Markus Vogel, Christian Faber, Gerd Häusler
  1. Institute of Optics, Information and Photonics, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)

zheng [dot] yang [at] physik [dot] uni-erlangen [dot] de

SIM (Structured-Illumination Microscopy) allows the full-field acquisition of (rough and) specular surfaces at microscopic scale [1]. By using micro-objectives we achieved a measurement uncertainty of 10 nm. We will discuss, how this advantageous principle can be scaled up for a large field ("Structured-Illumination Macroscopy"). To accomplish this task, we are confronted with serious technological challenges and with interesting physical questions. First, a big field, high-NA objective with very good correction is necessary to obtain low measurement uncertainty and high angular dynamics. Second, the illumination needs a particularly designed setup to ensure that the entrance pupil is completely filled. We present the first implementation of a macroscopic setup by means of applying commercial photo-objectives (NA 0.95) and an OLED-display. Furthermore, we will discuss the physical and technological problems, such as the achievable local measurement uncertainty and the systematic error caused by the lens aberrations. [1] C. Kranitzky, C. Richter, C. Faber, M. C. Knauer, G. Häusler: "3D-microscopy with large depth of field", Proc. DGaO 110, A12 (2009).

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@inproceedings{yang2011a6,
  author     = {Yang, Zheng and Dienstbier, Philipp and Bielke, Alexander and Vogel, Markus and Faber, Christian and Häusler, Gerd},
  title      = {{Full-field macroscopic measurement of specular, curved surfaces with SIM}},
  booktitle  = {DGaO-Proceedings 2011},
  series     = {DGaO-Proceedings},
  eventtitle = {112. Jahrestagung der DGaO},
  eventdate  = {2011-06-15/2011-06-18},
  venue      = {Ilmenau},
  publisher  = {Deutsche Gesellschaft für angewandte Optik e.V.},
  year       = {2011},
  pages      = {A6},
  langid     = {english},
  url        = {https://dgao-proceedings.de/paper/112-a6}
}
112. Annual Conference of the DGaO · Ilmenau · 2011