Nanometrology of molded sub-µm structures by means of light scattering

The integration of functional nanostructures into devices used in, e.g., photovoltaic or biomedical applications, represents an additional design parameter, which is employed to improve the device properties or to generate novel modalities. In solar cells, for example, nanostructures are embedded in order to increase the conversion efficiency. In mass production, these functional structures with sub-µm lateral and height dimensions are manufactured on large-area substrates (~m²), e.g. by injection molding. Appropriate techniques for nanometrology are needed to qualify the structures in the development stage (lab tools) and to assure the specified quality during the manufacturing process (inline process control). We investigated light scattering from injection molded nanopillar arrays and evaluated the adoption of the technique to production requirements. Polarized light scattering from the periodic structures has been simulated in order to derive appropriate camera-based experimental configurations. Finally, the deviation from the nominal structure geometries can be retrieved.